英语翻译.beta.-silicon carbide protective coating and method for

英语翻译
.beta.-silicon carbide protective coating and method for fabricating same
Abstract
A polycrystalline beta-silicon carbide film or coating and method for forming same on components,such as the top of solar cells,to act as an extremely hard protective surface,and as an anti-reflective coating.This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface,such as a solar cell.The thin film is then irradiated by a pulsed energy source,such as an excimer laser,to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC.While the method of this invention has primary application in solar cell manufacturing,it has application wherever there is a requirement for an extremely hard surface.