英语翻译The electrically parallel connected resistance evaporato

英语翻译
The electrically parallel connected resistance evaporators and the glowing electrode are arranged in the axis of an cylindrical vacuum chamber.The rotary cage bears the substrates to be coated (cases) and rotates around the evaporators.
A swiveling cover serves for time limiting of vapor deposition and therefore it essentially limits the thermal stress for the substrates.
The pumping unit evacuates the vacuum chamber to the required operational pressure.It is connected with a cryogenic pump to increase the water vapor displacement capacity (Meissner trap with belonging cooling unit)